Thin Film Deposition, Photoresist Strip, and CMP Products
To arrange for a Field Service Engineer to solve a current problem or to audit your tools for our latest support program enhancements, contact your local Field Service Office. Click Field Service for the office near you.
Engineering and Technical Support
The Global Response Center is staffed by knowledgeable and experienced Product Support Engineers who are available 24/7 to provide technical support via telephone. To contact an expert on your tool set, go directly to Engineering & Technical Support.
Spare Parts Support
Concerned about the cost of spares? With our Customer Specific Spare Parts program, you can
be confident that your parts management module contains only the components necessary to run your fab efficiently.
By leveraging your 24/7 access to our global spares inventory, you’ll get the most up-to-date
status of spares availability. Contact information is available on the Spare Parts Support web page.
Support, Publications, and Training
We provide documentation including Safety Alerts, Technical Memos, Process Bulletins, Part Change Notifications, Publications, Manuals, Drawings, and Schematics. Are you interested in attending one of our comprehensive training classes? To view technical documentation or upcoming class schedules, visit the MyLam website.