Spare Parts Support

Ordering 

Novellus customers can rely on the Novellus Logistics department to provide spares, refurbished parts, consumable supplies, preventative maintenance kits and more.  We provide this service for both warranty and non-warranty systems.

Part number information and Illustrated Parts Guides are available on the InfoSource website.

Customer Service Representatives (CSR) are available 24 hours a day, 7 days a week to support your critical and replenishment order needs.

Warranty Parts Orders

For systems under warranty or service contract, call your local FSE or Novellus Field office Field Service for assistance.

Regional Contact Information

For questions or assistance with spare parts ordering, contact us via the following phone numbers or email addresses.

Region Phone Fax Email
US 408-570-2701 408-953-4779 Logistics@Novellus.com
  877-569-6823    
Netherlands 31-20-655-6205 31-20-655-6195  
Japan 81-44-850-1790 81-44-850-1791 NSJ.logistics@Novellus.com
Korea 82-31-738-1114 82-31-714-9921  
Singapore 65-353-9288 65-353-6833  
Taiwan 886-3-5730550 886-3-5730554  
China 86-21-50802056 86-21-50802680  


Information Provided by Logistics CSR

Pre Sales
  • New account set up
  • Quotes
  • Advise customer of policies regarding warranty, discounts, refurbishment and return policy, etc.
Spares Sales
  • Order Processing
  • Expedite internally for urgent orders
  • Material movement – work with warehouse and shipping
Post Sales
  • RMA requests
  • Shipping discrepancies
  • Accounting or invoicing issue resolution