Spare Parts Support
Thin Film Deposition, Photoresist Strip, and CMP Products
Customers can rely on our Logistics department to provide spares, refurbished parts, consumable supplies, preventative maintenance kits and more. We provide this service for both warranty and non-warranty systems.
Part number information and Illustrated Parts Guides are available on the MyLam website.
Customer Service Representatives (CSR) are available 24 hours a day, 7 days a week to support your critical and replenishment order needs.
Warranty Parts Orders
For systems under warranty or service contract, call your local FSE or our Field office Field Service for assistance.
Regional Contact Information
For questions or assistance with spare parts ordering, contact us via the following phone numbers or email addresses.
Information Provided by Logistics CSR
- New account set up
- Advise customer of policies regarding warranty, discounts, refurbishment and return policy, etc.
- Order Processing
- Expedite internally for urgent orders
- Material movement – work with warehouse and shipping
- RMA requests
- Shipping discrepancies
- Accounting or invoicing issue resolution