Engineering & Technical Support

Global Response Center:

The Global Response Center can provide technical information, schematics, procedure information and recommendations regarding Novellus hardware, process or software – 24 hours a day, 7 days a week.

For 24/7 Telephone Support:

US and International Toll Free		866.800.5092
Alternate		408.545.3570

Product Support

Novellus Product Support provides the following technical documentation to our customers:

• Safety Alerts: Information which requires our customers’ immediate attention.
• Technical Bulletins: Information about component changes or new procedures that customers need to know before new product manuals are released.
• Field Change Order: Information about upgrades that enhance or add features to your tool set
• Procedure Change Order: Best known methods to make maintenance more efficient and effective. This information may originate in the field or from technical support.

These documents may be viewed on the Novellus InfoSource website.

For technical information about your equipment, you can also e-mail Product Support at:

ProductSupportAutomation@Novellus.com
ProductSupportCVD@Novellus.com
ProductSupportDirectMetals@Novellus.com
ProductSupportCMP@Novellus.com
ProductSupportGAPFILL@Novellus.com
ProductSupportPVD@Novellus.com
ProductSupportSABRE@Novellus.com
ProductSupportSIG@Novellus.com
ProductSupportVECTOR@Novellus.com
SoftwareSupport@Novellus.com