• Field Service
• Engineering & Technical Support
• Spare Parts Support

Engineering & Technical Support

Thin Film Deposition, Photoresist Strip, and CMP Products

Global Response Center:

The Global Response Center can provide technical information, schematics, procedure information and recommendations regarding our products' hardware, process or software – 24 hours a day, 7 days a week.

For 24/7 Telephone Support:

MyLam.com provides technical documentation which includes Safety Alerts, Technical Memos, Process Bulletins, Part Change Notifications, Publications, Manuals, Drawings, and Schematics. Are you interested in attending one of our comprehensive training classes? To view technical documentation or upcoming class schedules, visit the MyLam website. 

These documents may be viewed on the MyLam website.

For technical information about your equipment, you can also e-mail Product Support at:

ProductSupportAutomation@lamresearch.com
ProductSupportDirectMetals@lamresearch.com
ProductSupportCMP@lamresearch.com
ProductSupportGAPFILL@lamresearch.com
ProductSupportPVD@lamresearch.com
ProductSupportSABRE@lamresearch.com
ProductSupportSIG@lamresearch.com
ProductSupportVECTOR@lamresearch.com
SoftwareSupport@lamresearch.com