ATHENA™

ATHENA software is available for Novellus 300 mm tools that use the Proteus user interface. It’s a platform for high-resolution data collection and management, advanced equipment applications, advanced factory automation and remote e-diagnostics connectivity.

Athena has the following three modules

• Athena Knowledge Base^™ (AKB)
• Athena Advanced Factory Automation (AFA)
• Athena Remote^™ (AR)

Capabilities

AKB has advanced applications, which include Statistical Process control, equipment fault monitoring and notification, sensor integration and remote connectivity for e-diagnostics.

AFA provides the SEMI standards for Equipment Data Acquisition (EDA) "Interface A” as well as connections to other interfaces such as Modbus and HSMS.

AR^™ enables users to access the Novellus tool GUI and the ATHENA KB GUI from a computer outside of the cleanroom.

Benefits

ATHENA is a "must have" tool that enables equipment users to monitor, increase and maintain high tool productivity. The advanced equipment application encapsulates tool knowledge that enables detection of certain failures before they occur, thus preventing potential damage to products.