The SOLA is an innovative ultraviolet thermal processing (UVTP) system used for the low-temperature post-deposition treatment of dielectric films. SOLA is designed for advanced materials such as high-stress silicon nitrides and porous low-k dielectrics that are used to deliver increased device speeds and lower power consumption in sub-90 nm chips. SOLA employs a high-productivity multi-station sequential treatment (MSST) architecture that achieves a treatment non-uniformity of <2%, thereby improving device yields.
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SOLA
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