PECVD Products

Novellus' plasma-enhanced CVD (PECVD) systems deliver superior film quality, high net throughput and low cost of ownership in our customers’ high-volume fabrication plants around the world. These systems include:

SOLA™

The SOLA is an innovative ultra-violet thermal processing (UVTP) system used for the low-temperature post-deposition treatment of dielectric films. SOLA is designed for advanced materials such as high-stress silicon nitrides and porous low-k dielectrics that are used to deliver increased device speeds and lower power consumption in sub-90 nm chips. SOLA employs a high-productivity multi-station sequential treatment (MSST) architecture that achieves a treatment non-uniformity of <2%, thereby improving device yields.

SOLA