HDP-CVD Products

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High-density plasma (HDP) CVD technology provides a void-free gap fill of high-quality dielectric films in high aspect ratio device structures. Our HDP products are distinguished by their superior throughput and reliability. The unique source design of our HDP systems prevents device damage and provides excellent particle performance.

SPEED® Max

The SPEED Max 300 mm system offers significant flexibility and productivity benefits while extending the HDP CVD application into the 45nm and 32 nm nodes. SPEED Max's ability to run multiple processes for various devices in one platform, without any hardware changes, improves customer development times and tool utilizations across product lines.

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SPEED Max 300mm