HDP CVD Products

High-density plasma (HDP) CVD technology provides a void-free gap fill of high-quality dielectric films in high aspect ratio device structures. Novellus' HDP products are distinguished by their superior throughput and reliability. The unique source design of our HDP systems prevents device damage and provides excellent particle performance.


SPEED® Max™

The SPEED Max 300 mm system offers significant flexibility and productivity benefits while extending the HDP CVD application into the 45nm and 32 nm nodes. SPEED Max's ability to run multiple processes for various devices in one platform, without any hardware changes, improves customer development times and tool utilizations across product lines.

SPEED Max 300 mm

SPEED® NExT™

The SPEED NExT 300 mm system provides the industry with the first robust high-density plasma gapfill technology for volume production at the 65 nm node. SPEED NExT builds upon the superior high conductance chamber design of the existing SPEED platform with an innovative source technology that enables repeatable gap fill across a 300 mm wafer. In addition, the unique ability to control the wafer position relative to the source allows SPEED NExT to have a wider gap fill process window


Concept Three SPEED

The Concept 3 SPEED system for 300 mm wafers employs a proprietary hemispherical ion source and bi-polar electrostatic chuck for superior ion uniformity and temperature control. Due to inherent source design characteristics, ion uniformity remains unchanged as these elements are scaled up for 300 mm. With an optimized gas delivery system, the overall within-wafer uniformity is improved.

Concept Three SPEED

Concept Two® SPEED

The Concept Two SPEED for 200 mm wafers features a patented hemispherical source that delivers industry-leading throughput and manufacturability. The hemispherical source features a single excitation frequency and a single coil. This simple, elegant solution outperforms other systems that require complex multiple coils to approach the ion uniformity level of SPEED.

Concept Two SPEED